Foundations of MEMS (Illinois Ece Series) |
| Author: Chang Liu
Publisher: Prentice Hall
Category: Book
List Price: $147.00
Buy Used: $74.99
You Save: $72.01 (49%)
New (24) Used (8) from $74.99
Sales Rank: 695632
Media: Hardcover
Edition: US ed
Pages: 530
Number Of Items: 1
Shipping Weight (lbs): 2.4
Dimensions (in): 9.3 x 7.6 x 1.2
ISBN: 0131472860
Dewey Decimal Number: 621.3
EAN: 9780131472860
ASIN: 0131472860
Publication Date: September 5, 2005
Availability: Usually ships in 1-2 business days
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Product Description
For courses in Micro-Electro-Mechanical Systems (MEMS) taken by advanced undergraduate students, beginning graduate students, and professionals. Foundations of MEMS is the first entry-level text of its kind for systematically teaching the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology -- all in a time-efficient and methodical manner. A wealth of examples and problems solidify students' understanding of abstract concepts and provide ample opportunities for practicing critical thinking.
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