Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition | 
| Author: Marc J. Madou
Publisher: CRC
Category: Book
List Price: $119.95
Buy New: $95.96
You Save: $23.99 (20%)
New (27) Used (13) from $81.95
Rating:  3 reviews
Sales Rank: 247505
Media: Hardcover
Edition: 2
Pages: 752
Number Of Items: 1
Shipping Weight (lbs): 4.4
Dimensions (in): 11.1 x 8.6 x 1.8
ISBN: 0849308267
Dewey Decimal Number: 621.38152
EAN: 9780849308260
ASIN: 0849308267
Publication Date: March 13, 2002
Availability: Usually ships in 24 hours
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Product Description
MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world. A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field. Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem. New in the Second Edition Revised chapters that reflect the many recent advances in the field Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs. Many more links to the Web Problem sets in each chapter
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| Customer Reviews:
Reference Resource September 30, 2005
B. T. Price
Comprehensive in-depth reference tool - this is how the book has been characterized by a university professor using it for his course instruction. I concur. Amazing amount of practical detail in one refernce. Dimensionally a bit large and gangly but likely would require mulitple volumes if in standard book size. The web page link is a nice feature given the fast moving topic. Cleanroom reference is out of date and could be updated given the reference focus. Text discusssions well written and unusually pleasant to read.
honey HE(Marc J. Madou) shrunk the world.... May 31, 2001
Vadlamani, Venkata Subramaniam (Columbia, Missouri United States)
8 out of 13 found this review helpful
Nanotechnology and MEMS are among the active research areas world and will continue to be so during the next decade and paving way to new generation of taking an insight into micro world making this work "Fundamentals of Microfabrication" an important stepping stone for the better future. Marc J. Madou is internationally recognized expert on sensors and sensor instrumentation who is also a leading authority on nanotechnology and microfabrication. This book will functions hand book for beginners. This book helps you explore the world of micromachines and miniaturization. The Ten chapters cover in detail, topics explaining the methodogy of microfabrications including micromachining technologies available today. Comparision of traditional and non-traditional microfabrication tools for different applications. The book also provides discussion about quantum structures and reviews molecular engineering. Appendices offer valuable information in an easily accessible format. Hyperlinked documents are provided for futher exploring the world of micromachining and microfabrication.
Fundamentals of Microfabrication May 27, 2000
Adisorn Tuantranont (Boulder, CO, USA)
17 out of 21 found this review helpful
This book helps you explore the world of micromachines and miniaturization. First 6 chapters review and explain the methodogy of microfabrications including micromachining technologies available today. Chapter 7 compares traditional and non-traditional microfabrication tools for different applications. New device development and hot topics of micromachined packaging are explored in chapter 8. Nice up-to-date list of hyperlinked documents from all around the world is placed at the end of the book for futher exploring the world of micromachining and microfabrication.
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